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High-resolution X-ray diffraction study of free-standing gallium arsenide coiled membrane force sensors produced by micromachining

Lal, K. and Goswami, N. and Miao, J. and Hartnagel, H. L. (1999):
High-resolution X-ray diffraction study of free-standing gallium arsenide coiled membrane force sensors produced by micromachining.
In: Indo-Russian Workshop on Micromechanical Systems = SPIE Proceedings. Vol. 3903 (1999), [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 1999
Creators: Lal, K. and Goswami, N. and Miao, J. and Hartnagel, H. L.
Title: High-resolution X-ray diffraction study of free-standing gallium arsenide coiled membrane force sensors produced by micromachining
Language: English
Series Name: Indo-Russian Workshop on Micromechanical Systems = SPIE Proceedings. Vol. 3903 (1999)
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 16:05
License: [undefiniert]
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