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Number of items: 5.

Ballas, Ruediger and Schmid, Andreas Joseph and Schlaak, Helmut F. and Mössinger, A. and Meissner, Peter and Töpfer, U. and Murmann-Biesenecker, H. and Munz, G. and Maichl, M. (2004):
High-accuracy deflection measurement of a piezoelectric beam multilayer actuator with an integrated capacitive strain sensor.
Microtechnology, Mechatronics and Materials, international conference [in connection with] O.M.P. - Opto Micro Products, In: My2M 2004 <1, 2004, Nürnberg>: Proceedings ... - Microtechnology, Mechatronics and Materials : international conference [in connection with] O.M.P. - Opto Micro Products, International Trade Fair for Optical and Microtechnology Products, 25 - 27 May 2004, [Conference or Workshop Item]

Ballas, Ruediger and Schmid, Andreas Joseph and Schlaak, Helmut F. and Kolb, A. and Mössinger, A. and Meissner, Peter and Töpfer, U. and Murmann-Biesenecker, H. and Munz, G. and Maichl, M. (2004):
High-accuracy sensor electronics for deflection measurement of a piezoelectric bending beam multilayer actuator.
Bremen, HVG Hanseatische Veranstaltungs-GmbH, In: Actuator 2004 : conference proceedings ; 14 - 16 June 2004, Bremen, Germany / 9th International Conference on New Actuators & 3rd International Exhibition on Smart Actuators and Drive Systems. Ed.: Hubert Borgmann.- Bremen : HVG Hanseatische Veranstaltung, [Conference or Workshop Item]

Schmid, J. and Töpfer, U. and Murmann-Biesenecker, H. and Munz, G. and Münzenmaier, A. and Maichl, M. and Ballas, Ruediger and Schlaak, Helmut F. and Steinkopff, T. and Schuh, C. and Laurent, M. and Bödinger, H. and Hoffmann, M. and Wagner, S. (2004):
Piezoelectric micro actuator with an integrated sensor to control the air flow in a micro valve.
Bremen, HVG Hanseatische Veranstaltungs-GmbH, In: Actuator 2004 : conference proceedings ; 14 - 16 June 2004, Bremen, Germany / 9th International Conference on New Actuators & 3rd International Exhibition on Smart Actuators and Drive Systems. Ed.: Hubert Borgmann.- Bremen : HVG Hanseatische Veranstaltung, [Conference or Workshop Item]

Schmidt, J. and Töpfer, U. and Ballas, Ruediger and Schlaak, Helmut F. and Munz, G. and Maichl, M. and Münzenmaier, A. (2003):
Piezoelectric beam multilayer actuator with an integrated capacitive strain sensor to detect deflection.
Wunstorf, AMA Service Ges., In: SENSOR 2003 : 11th international conference ; 13 - 15 May 2003, Exhibition Centre Nuremberg, Germany ; proceedings / an event of the Association for Sensor Technology, AMA.- Wunstorf : AMA Service Ges., 2003.- S. 279-286, [Conference or Workshop Item]

Schmid, Andreas Joseph and Wich, T. and Fischer, T. and Töpfer, U. and Steinkopff, T. and Schuh, C. and Weinmann, M. and Maichl, M. and Munz, G. and Hanisch, C. and Schlaak, Helmut F. and Ballas, Ruediger and Hoffmann, M. and Wagner, S. (2002):
Low voltage piezoelectric actuator with integrated strain gauge : a new technology for industrial automation.
In: International Conference on New Actuators <8, 2002, Bremen>: Actuator 2002, conference proceedings.- Bremen, 2002.- ISBN 3-933339-04-9.- S. 512-515, [Conference or Workshop Item]

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