Englisch

Höchbauer, T. ; Misra, A. ; Nastasi, M. ; Henttinen, K. ; Suni, T. ; Suni, I. ; Lau, S. S. ; Ensinger, W. (2004)
Comparison of thermally and mechanically induced Si layer transfer in hydrogen-implanted Si wafers.
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 216
doi: 10.1016/j.nimb.2003.11.043
Artikel, Bibliographie

Ensinger, Wolfgang ; Volz, K. ; Höchbauer, T. (2000)
Plasma immersion ion implantation of complex-shaped objects: an experimental study on the treatment homogeneity.
In: Surface and Coatings Technology, (128-129)
doi: 10.1016/S0257-8972(00)00601-0
Artikel, Bibliographie