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Höchbauer, T. and Misra, A. and Nastasi, M. and Henttinen, K. and Suni, T. and Suni, I. and Lau, S. S. and Ensinger, W. :
Comparison of thermally and mechanically induced Si layer transfer in hydrogen-implanted Si wafers.
[Online-Edition: http://dx.doi.org/10.1016/j.nimb.2003.11.043]
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 216 pp. 257-263. ISSN 0168583X
[Article] , (2004)

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