Höchbauer, T. ; Misra, A. ; Nastasi, M. ; Henttinen, K. ; Suni, T. ; Suni, I. ; Lau, S. S. ; Ensinger, W. (2004)
Comparison of thermally and mechanically induced Si layer transfer in hydrogen-implanted Si wafers.
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 216
doi: 10.1016/j.nimb.2003.11.043
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