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Höchbauer, T. and Misra, A. and Nastasi, M. and Henttinen, K. and Suni, T. and Suni, I. and Lau, S. S. and Ensinger, W. :
Comparison of thermally and mechanically induced Si layer transfer in hydrogen-implanted Si wafers.
[Online-Edition: http://dx.doi.org/10.1016/j.nimb.2003.11.043]
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 216 pp. 257-263. ISSN 0168583X
[Article] , (2004)

Ensinger, Wolfgang and Volz, K. and Höchbauer, T. :
Plasma immersion ion implantation of complex-shaped objects: an experimental study on the treatment homogeneity.
[Online-Edition: http://dx.doi.org/10.1016/S0257-8972(00)00601-0]
In: Surface and Coatings Technology (128-129) pp. 265-269. ISSN 02578972
[Article] , (2000)

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