Deutsch

Peter, D. ; Dalmer, M. ; Lechner, A. ; Gigler, A. M. ; Stark, R. W. ; Bensch, W. (2012)
The influence of liquid media on the fracture strength of polysilicon nanostructures.
In: Diffusion and Defect Data Part B (Solid State Phenomena), 187
Artikel, Bibliographie

Englisch

Peter, D. ; Dalmer, M. ; Lechner, A. ; Gigler, A. M. ; Stark, R. W. ; Bensch, W. (2011)
Maesurement of the mechanical stability of semiconductor line structures in drying liquids with application to pattern collapse.
In: J. Micromech. Microeng., 21
Artikel, Bibliographie

Peter, D. ; Dalmer, M. ; Kruwinus, H. ; Lechner, A. ; Archer, L. ; Gaulhofer, E. ; Gigler, A. M. ; Stark, R. W. ; Bensch, W. (2009)
Measurement of the mechanical stability of semiconductor line structures in relevant media.
doi: 10.1149/1.3108349
Konferenzveröffentlichung, Bibliographie