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Number of items: 3.

Peter, D. ; Dalmer, M. ; Lechner, A. ; Gigler, A. M. ; Stark, R. W. ; Bensch, W. (2012):
The influence of liquid media on the fracture strength of polysilicon nanostructures.
In: Diffusion and Defect Data Part B (Solid State Phenomena), 187, pp. 127-30. [Article]

Peter, D. ; Dalmer, M. ; Lechner, A. ; Gigler, A. M. ; Stark, R. W. ; Bensch, W. (2011):
Maesurement of the mechanical stability of semiconductor line structures in drying liquids with application to pattern collapse.
In: J. Micromech. Microeng., 21, pp. 025001. [Article]

Peter, D. ; Dalmer, M. ; Kruwinus, H. ; Lechner, A. ; Archer, L. ; Gaulhofer, E. ; Gigler, A. M. ; Stark, R. W. ; Bensch, W. (2009):
Measurement of the mechanical stability of semiconductor line structures in relevant media.
In: Vol. 16, iss. 4, In: ECS Trans, p. 13,
[Conference or Workshop Item]

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