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Measurement of the mechanical stability of semiconductor line structures in relevant media

Peter, D. ; Dalmer, M. ; Kruwinus, H. ; Lechner, A. ; Archer, L. ; Gaulhofer, E. ; Gigler, A. M. ; Stark, R. W. ; Bensch, W. (2009):
Measurement of the mechanical stability of semiconductor line structures in relevant media.
In: Vol. 16, iss. 4, In: ECS Trans, p. 13,
[Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2009
Creators: Peter, D. ; Dalmer, M. ; Kruwinus, H. ; Lechner, A. ; Archer, L. ; Gaulhofer, E. ; Gigler, A. M. ; Stark, R. W. ; Bensch, W.
Title: Measurement of the mechanical stability of semiconductor line structures in relevant media
Language: English
Title of Book: ECS Trans
Series Name: Vol. 16
Volume: iss. 4
Divisions: ?? fb99_csi~fg5 ??
UNSPECIFIED
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Date Deposited: 05 Jul 2010 07:30
Identification Number: doi:10.1149/1.3108349
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