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Measurement of the mechanical stability of semiconductor line structures in relevant media

Peter, D. and Dalmer, M. and Kruwinus, H. and Lechner, A. and Archer, L. and Gaulhofer, E. and Gigler, A. M. and Stark, R. W. and Bensch, W. (2009):
Measurement of the mechanical stability of semiconductor line structures in relevant media.
In: ECS Trans, In: Vol. 16, iss. 4, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2009
Creators: Peter, D. and Dalmer, M. and Kruwinus, H. and Lechner, A. and Archer, L. and Gaulhofer, E. and Gigler, A. M. and Stark, R. W. and Bensch, W.
Title: Measurement of the mechanical stability of semiconductor line structures in relevant media
Language: English
Title of Book: ECS Trans
Series Name: Vol. 16
Volume: iss. 4
Divisions: ?? fb99_csi~fg5 ??
UNSPECIFIED
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Date Deposited: 05 Jul 2010 07:30
Identification Number: doi:10.1149/1.3108349
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