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Stelzner, Thomas and Arold, M. and Falk, F. and Stafast, Herbert and Probst, Daniel and Hoche, Holger (2005):
Single source precursors for plasma-enhanced CVD of SiCN films, investigated by mass spectrometry.
In: Surface & coatings technology, pp. 372-376, 200, [Article]

This list was generated on Tue Jul 16 01:53:48 2019 CEST.