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Walther, F. and Davydovskaya, P. and Zürcher, S. and Kaiser, M. and Herberg, H. and Gigler, A. M. and Stark, R. W. (2007):
Stability of the hydrophilic behaviour of oxygen plasma activated SU-8.
In: Journal of Micromechanics and Microengineering, 17 (3), pp. 524-531. IOP Publishing Ltd., ISSN 0960-1317,
DOI: 10.1088/0960-1317/17/3/015,

Walther, F. and Zürcher, S. and Hennemeyer, M. and Kaiser, M. and Herberg, H. and Stark, R. W. (2006):
Hydrophobic recovery of SU-8 after O2-plasma treatment.
In: Int. Workshop on Nanomechanical Sensors, pp. pp. 52-53, Copenhagen, Denmark, May 7-10, [Conference or Workshop Item]

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