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Hydrophobic recovery of SU-8 after O2-plasma treatment

Walther, F. and Zürcher, S. and Hennemeyer, M. and Kaiser, M. and Herberg, H. and Stark, R. W. (2006):
Hydrophobic recovery of SU-8 after O2-plasma treatment.
In: Int. Workshop on Nanomechanical Sensors, pp. pp. 52-53, Copenhagen, Denmark, May 7-10, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2006
Creators: Walther, F. and Zürcher, S. and Hennemeyer, M. and Kaiser, M. and Herberg, H. and Stark, R. W.
Title: Hydrophobic recovery of SU-8 after O2-plasma treatment
Language: English
Series Name: Int. Workshop on Nanomechanical Sensors
Divisions: ?? fb99_csi~fg5 ??
UNSPECIFIED
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Event Location: Copenhagen, Denmark
Event Dates: May 7-10
Date Deposited: 05 Jul 2010 11:39
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