Walther, F. and Zürcher, S. and Hennemeyer, M. and Kaiser, M. and Herberg, H. and Stark, R. W. (2006):
Hydrophobic recovery of SU-8 after O2-plasma treatment.
In: Int. Workshop on Nanomechanical Sensors, pp. pp. 52-53, Copenhagen, Denmark, May 7-10, [Conference or Workshop Item]
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2006 |
| Creators: | Walther, F. and Zürcher, S. and Hennemeyer, M. and Kaiser, M. and Herberg, H. and Stark, R. W. |
| Title: | Hydrophobic recovery of SU-8 after O2-plasma treatment |
| Language: | English |
| Series Name: | Int. Workshop on Nanomechanical Sensors |
| Divisions: | ?? fb99_csi~fg5 ?? UNSPECIFIED Zentrale Einrichtungen |
| Event Location: | Copenhagen, Denmark |
| Event Dates: | May 7-10 |
| Date Deposited: | 05 Jul 2010 11:39 |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
 |
Send an inquiry |
Options (only for editors)
 |
Show editorial Details |
Drucken
Impressum