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Stability of the hydrophilic behaviour of oxygen plasma activated SU-8

Walther, F. and Davydovskaya, P. and Zürcher, S. and Kaiser, M. and Herberg, H. and Gigler, A. M. and Stark, R. W. (2007):
Stability of the hydrophilic behaviour of oxygen plasma activated SU-8.
In: Journal of Micromechanics and Microengineering, 17 (3), pp. 524-531. IOP Publishing Ltd., ISSN 0960-1317,
DOI: 10.1088/0960-1317/17/3/015,
[Article]

Item Type: Article
Erschienen: 2007
Creators: Walther, F. and Davydovskaya, P. and Zürcher, S. and Kaiser, M. and Herberg, H. and Gigler, A. M. and Stark, R. W.
Title: Stability of the hydrophilic behaviour of oxygen plasma activated SU-8
Language: English
Journal or Publication Title: Journal of Micromechanics and Microengineering
Journal volume: 17
Number: 3
Publisher: IOP Publishing Ltd.
Divisions: Zentrale Einrichtungen
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Date Deposited: 08 Jun 2010 08:00
DOI: 10.1088/0960-1317/17/3/015
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