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Dopant Free Multi-Gate Silicon Nanowire CMOS-Inverter on SOI Substrate

Wessely, Frank and Krauss, Tillmann and Endres, Ralf and Schwalke, Udo (2010):
Dopant Free Multi-Gate Silicon Nanowire CMOS-Inverter on SOI Substrate.
In: 5th International Conference on Design & Technology of Integrated Systems in Nanoscale Era (DTIS), pp. 1-3, [Online-Edition: http://dx.doi.org/10.1109/DTIS.2010.5487572],
[Article]

Item Type: Article
Erschienen: 2010
Creators: Wessely, Frank and Krauss, Tillmann and Endres, Ralf and Schwalke, Udo
Title: Dopant Free Multi-Gate Silicon Nanowire CMOS-Inverter on SOI Substrate
Language: English
Journal or Publication Title: 5th International Conference on Design & Technology of Integrated Systems in Nanoscale Era (DTIS)
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Event Title: 5th International Conference on Design & Technology of Integrated Systems in Nanoscale Era (DTIS)
Event Location: Hammamet, Tunesien
Event Dates: 23.-25.03.2010
Date Deposited: 28 Jun 2011 12:36
Official URL: http://dx.doi.org/10.1109/DTIS.2010.5487572
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