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Evaluation of MOSFETs with Crystalline High-k Gate-dielectrics: Device Simulation and Experimental Data

Zaunert, Florian and Endres, Ralf and Stefanov, Yordan and Schwalke, Udo (2006):
Evaluation of MOSFETs with Crystalline High-k Gate-dielectrics: Device Simulation and Experimental Data.
In: 7th Symposium Diagnostics & Yield - Advanced Silicon Devices and Technologies for ULSI Era, Warschau, Polen, 25.-28.06.2006, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2006
Creators: Zaunert, Florian and Endres, Ralf and Stefanov, Yordan and Schwalke, Udo
Title: Evaluation of MOSFETs with Crystalline High-k Gate-dielectrics: Device Simulation and Experimental Data
Language: English
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Event Title: 7th Symposium Diagnostics & Yield - Advanced Silicon Devices and Technologies for ULSI Era
Event Location: Warschau, Polen
Event Dates: 25.-28.06.2006
Date Deposited: 20 Nov 2008 08:27
License: [undefiniert]
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