Ruland, Tino and Stefanov, Yordan and Rispal, Lorraine and Schwalke, Udo (2004):
Application of Atomic Force Microscopy in Resist Structure Evaluation.
In: VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik, (1860), [Article]
Item Type: | Article |
---|---|
Erschienen: | 2004 |
Creators: | Ruland, Tino and Stefanov, Yordan and Rispal, Lorraine and Schwalke, Udo |
Title: | Application of Atomic Force Microscopy in Resist Structure Evaluation |
Language: | English |
Journal or Publication Title: | VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik |
Number: | 1860 |
Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
Event Title: | International Symposium on Measurement and Quality Control in Production |
Event Location: | Erlangen, Deutschland |
Event Dates: | 12.-15.10.2004 |
Date Deposited: | 20 Nov 2008 08:20 |
License: | [undefiniert] |
Export: | |
Suche nach Titel in: | TUfind oder in Google |
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