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Number of items: 2.

Schmid, J. and Töpfer, U. and Murmann-Biesenecker, H. and Munz, G. and Münzenmaier, A. and Maichl, M. and Ballas, Ruediger and Schlaak, Helmut F. and Steinkopff, T. and Schuh, C. and Laurent, M. and Bödinger, H. and Hoffmann, M. and Wagner, S. (2004):
Piezoelectric micro actuator with an integrated sensor to control the air flow in a micro valve.
In: Actuator 2004 : conference proceedings ; 14 - 16 June 2004, Bremen, Germany / 9th International Conference on New Actuators & 3rd International Exhibition on Smart Actuators and Drive Systems. Ed.: Hubert Borgmann.- Bremen : HVG Hanseatische Veranstaltung, Bremen, HVG Hanseatische Veranstaltungs-GmbH, [Conference or Workshop Item]

Schmidt, J. and Töpfer, U. and Ballas, Ruediger and Schlaak, Helmut F. and Munz, G. and Maichl, M. and Münzenmaier, A. (2003):
Piezoelectric beam multilayer actuator with an integrated capacitive strain sensor to detect deflection.
In: SENSOR 2003 : 11th international conference ; 13 - 15 May 2003, Exhibition Centre Nuremberg, Germany ; proceedings / an event of the Association for Sensor Technology, AMA.- Wunstorf : AMA Service Ges., 2003.- S. 279-286, Wunstorf, AMA Service Ges., [Conference or Workshop Item]

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