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Ionescu, E. ; Martinez Crespiera, S. ; Schlosser, M. ; Flittner, K. ; Schlaak, Helmut F. ; Riedel, R. (2011):
Herstellung Silicumoxycarbid-basierter mikrostrukturierter Bauteile mittels Photolithographie- und Soft Lithographie-Verfahren.
Mikrosystemtechnik Kongress 2011, Darmstadt, 10. - 12.10.2011, [Conference or Workshop Item]

Martínez-Crespiera, S. ; Ionescu, E. ; Schlosser, M. ; Flittner, K. ; Mistura, G. ; Riedel, R. ; Schlaak, H. F. (2011):
Fabrication of silicon oxycarbide-based microcomponents via photolithographic and soft lithography approaches.
In: Sensors and Actuators A: Physical, 169 (1), pp. 242-249. Elsevier, ISSN 09244247,
[Article]

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