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Fabrication of silicon oxycarbide-based microcomponents via photolithographic and soft lithography approaches

Martínez-Crespiera, S. ; Ionescu, E. ; Schlosser, M. ; Flittner, K. ; Mistura, G. ; Riedel, R. ; Schlaak, H. F. (2011)
Fabrication of silicon oxycarbide-based microcomponents via photolithographic and soft lithography approaches.
In: Sensors and Actuators A: Physical, 169 (1)
doi: 10.1016/j.sna.2011.04.041
Artikel, Bibliographie

Kurzbeschreibung (Abstract)

This work presents the fabrication of SiOC ceramic microparts starting from a commercially available preceramic polysiloxane. Two different micro structuring techniques were applied, e.g. photolithography and soft-lithography. For both processes, photo-crosslinking of the preceramic polymer was performed. Subsequently, the green microparts were pyrolysed under argon at temperatures between 1000 and 1400 °C to yield ceramic SiOC microcomponents. In this way, ceramic microstructures on Si wafers (with dimensions down to 20 μm) have been obtained by photolithographic techniques; free-standing and complex shaped ceramic microcomponents (aspect ratios up to 3:1) were also produced using soft lithography techniques, i.e. replica molding (RM) followed by micro transfer molding (μTM).

Typ des Eintrags: Artikel
Erschienen: 2011
Autor(en): Martínez-Crespiera, S. ; Ionescu, E. ; Schlosser, M. ; Flittner, K. ; Mistura, G. ; Riedel, R. ; Schlaak, H. F.
Art des Eintrags: Bibliographie
Titel: Fabrication of silicon oxycarbide-based microcomponents via photolithographic and soft lithography approaches
Sprache: Englisch
Publikationsjahr: 10 September 2011
Verlag: Elsevier
Titel der Zeitschrift, Zeitung oder Schriftenreihe: Sensors and Actuators A: Physical
Jahrgang/Volume einer Zeitschrift: 169
(Heft-)Nummer: 1
DOI: 10.1016/j.sna.2011.04.041
Kurzbeschreibung (Abstract):

This work presents the fabrication of SiOC ceramic microparts starting from a commercially available preceramic polysiloxane. Two different micro structuring techniques were applied, e.g. photolithography and soft-lithography. For both processes, photo-crosslinking of the preceramic polymer was performed. Subsequently, the green microparts were pyrolysed under argon at temperatures between 1000 and 1400 °C to yield ceramic SiOC microcomponents. In this way, ceramic microstructures on Si wafers (with dimensions down to 20 μm) have been obtained by photolithographic techniques; free-standing and complex shaped ceramic microcomponents (aspect ratios up to 3:1) were also produced using soft lithography techniques, i.e. replica molding (RM) followed by micro transfer molding (μTM).

Freie Schlagworte: Polymer derived ceramics, Photolithography, Soft-lithography, SiOC, Microcomponents
Fachbereich(e)/-gebiet(e): 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Disperse Feststoffe
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft
11 Fachbereich Material- und Geowissenschaften
Hinterlegungsdatum: 04 Apr 2012 09:13
Letzte Änderung: 05 Mär 2013 10:00
PPN:
Sponsoren: European Community FP6 (MCRTN-019601, PolyCerNet), Bundesministerium für Bildung und Forschung, Berlin, Germany (BMBF, Grant No. 16SV3724), The authors acknowledge also the company Starfire Systems Inc., USA, for providing Polyramic® RD-684a.
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