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Martínez-Crespiera, S. and Ionescu, E. and Schlosser, M. and Flittner, K. and Mistura, G. and Riedel, R. and Schlaak, H. F. (2011):
Fabrication of silicon oxycarbide-based microcomponents via photolithographic and soft lithography approaches.
In: Sensors and Actuators A: Physical, 169 (1), Elsevier, pp. 242-249, ISSN 09244247,
[Online-Edition: http://dx.doi.org/10.1016/j.sna.2011.04.041],

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