Martínez-Crespiera, S. ; Ionescu, E. ; Schlosser, M. ; Flittner, K. ; Mistura, G. ; Riedel, R. ; Schlaak, H. F. (2011)
Fabrication of silicon oxycarbide-based microcomponents via photolithographic and soft lithography approaches.
In: Sensors and Actuators A: Physical, 169 (1)
doi: 10.1016/j.sna.2011.04.041
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