Greiner, Felix ; Quednau, Sebastian ; Dassinger, Florian ; Sarwar, Reza ; Schlaak, Helmut F. ; Guttmann, Markus ; Meyer, Pascal (2013):
Fertigungstechniken für Multiskalen-3D-Mikrosysteme mit vertikaler Metall-Mikro- und Nanodraht-Integration GMM-Preis 2013.
Mikrosystemtechnik Kongress 2013, Aachen, 14.-16- Oktober 2013, [Conference or Workshop Item]
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2013 |
| Creators: | Greiner, Felix ; Quednau, Sebastian ; Dassinger, Florian ; Sarwar, Reza ; Schlaak, Helmut F. ; Guttmann, Markus ; Meyer, Pascal |
| Title: | Fertigungstechniken für Multiskalen-3D-Mikrosysteme mit vertikaler Metall-Mikro- und Nanodraht-Integration GMM-Preis 2013 |
| Language: | German |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018) 18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems |
| Event Title: | Mikrosystemtechnik Kongress 2013 |
| Event Location: | Aachen |
| Event Dates: | 14.-16- Oktober 2013 |
| Date Deposited: | 07 Jan 2014 06:49 |
| PPN: | |
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