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Fabrication techniques of multiscale 3D-MEMS with vertical metal micro- and nanowire integration

Greiner, Felix ; Quednau, Sebastian ; Dassinger, Florian ; Sarwar, Reza ; Schlaak, Helmut F. ; Guttmann, Markus ; Meyer, Pascal (2013)
Fabrication techniques of multiscale 3D-MEMS with vertical metal micro- and nanowire integration.
In: Journal of Micromechanics and Microengineering
doi: 10.1088/0960-1317/23/2/025018
Article, Bibliographie

Item Type: Article
Erschienen: 2013
Creators: Greiner, Felix ; Quednau, Sebastian ; Dassinger, Florian ; Sarwar, Reza ; Schlaak, Helmut F. ; Guttmann, Markus ; Meyer, Pascal
Type of entry: Bibliographie
Title: Fabrication techniques of multiscale 3D-MEMS with vertical metal micro- and nanowire integration
Language: English
Date: 9 January 2013
Journal or Publication Title: Journal of Micromechanics and Microengineering
DOI: 10.1088/0960-1317/23/2/025018
Corresponding Links:
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018)
18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems
Date Deposited: 10 Jan 2013 10:08
Last Modified: 05 Mar 2013 10:02
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