Greiner, Felix ; Quednau, Sebastian ; Dassinger, Florian ; Sarwar, Reza ; Schlaak, Helmut F. ; Guttmann, Markus ; Meyer, Pascal (2013):
Fabrication techniques of multiscale 3D-MEMS with vertical metal micro- and nanowire integration.
In: Journal of Micromechanics and Microengineering, ISSN 1361-6439,
[Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 2013 |
| Creators: | Greiner, Felix ; Quednau, Sebastian ; Dassinger, Florian ; Sarwar, Reza ; Schlaak, Helmut F. ; Guttmann, Markus ; Meyer, Pascal |
| Title: | Fabrication techniques of multiscale 3D-MEMS with vertical metal micro- and nanowire integration |
| Language: | English |
| Journal or Publication Title: | Journal of Micromechanics and Microengineering |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018) 18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems |
| Date Deposited: | 10 Jan 2013 10:08 |
| Identification Number: | doi:10.1088/0960-1317/23/2/025018 |
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