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Wisotzki, E. ; Balogh, Adam G. ; Hahn, H. ; Wolan, J. T. ; Hoflund, G. B. (1999):
Room-temperature growth of ZrO2 thin films using a novel hyperthermal oxygen-atom source.
In: Journal of Vacuum Science and Technology A, 17 (1), pp. 14-18. American Vacuum Society (AVS), ISSN 0734-2101, e-ISSN 1520-8559,
DOI: 10.1116/1.581547,
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