Wisotzki, E. ; Balogh, Adam G. ; Hahn, H. ; Wolan, J. T. ; Hoflund, G. B. (1999):
Room-temperature growth of ZrO2 thin films using a novel hyperthermal oxygen-atom source.
In: Journal of Vacuum Science and Technology A, 17 (1), pp. 14-18. American Vacuum Society (AVS), ISSN 0734-2101, e-ISSN 1520-8559,
DOI: 10.1116/1.581547,
[Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 1999 |
| Creators: | Wisotzki, E. ; Balogh, Adam G. ; Hahn, H. ; Wolan, J. T. ; Hoflund, G. B. |
| Title: | Room-temperature growth of ZrO2 thin films using a novel hyperthermal oxygen-atom source |
| Language: | English |
| Journal or Publication Title: | Journal of Vacuum Science and Technology A |
| Journal Volume: | 17 |
| Issue Number: | 1 |
| Publisher: | American Vacuum Society (AVS) |
| Divisions: | 11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences > Material Science > Material Analytics |
| Date Deposited: | 14 Jun 2011 14:06 |
| DOI: | 10.1116/1.581547 |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
 |
Send an inquiry |
Options (only for editors)
 |
Show editorial Details |
Drucken
Impressum