Wisotzki, E. and Balogh, Adam G. and Hahn, H. and Wolan, J. T. and Hoflund, G. B. (1999):
Room-temperature growth of ZrO2 thin films using a novel hyperthermal oxygen-atom source.
In: Journal of Vacuum Science and Technology A, (1), 17. American Vacuum Society (AVS), pp. 14-18, ISSN 0734-2101, e-ISSN 1520-8559,
DOI: 10.1116/1.581547,
[Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 1999 |
| Creators: | Wisotzki, E. and Balogh, Adam G. and Hahn, H. and Wolan, J. T. and Hoflund, G. B. |
| Title: | Room-temperature growth of ZrO2 thin films using a novel hyperthermal oxygen-atom source |
| Language: | English |
| Journal or Publication Title: | Journal of Vacuum Science and Technology A |
| Journal volume: | 17 |
| Number: | 1 |
| Publisher: | American Vacuum Society (AVS) |
| Divisions: | 11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences > Material Science > Material Analytics |
| Date Deposited: | 14 Jun 2011 14:06 |
| DOI: | 10.1116/1.581547 |
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| Suche nach Titel in: | TUfind oder in Google |
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