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Wisotzki, E. and Balogh, Adam G. and Hahn, H. and Wolan, J. T. and Hoflund, G. B. (1999):
Room-temperature growth of ZrO2 thin films using a novel hyperthermal oxygen-atom source.
In: Journal of Vacuum Science and Technology A, (1), 17. American Vacuum Society (AVS), pp. 14-18, ISSN 0734-2101, e-ISSN 1520-8559,
DOI: 10.1116/1.581547,

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