Flege, S. ; Hatada, R. ; Kaiser, T. ; Muench, F. ; Cherkashinin, G. ; Schwöbel, A. ; Ensinger, W. ; Baba, K. (2016)
Use of a nanostructured surface coating to achieve higher sputter rates.
In: Materials Letters, 164
doi: 10.1016/j.matlet.2015.11.059
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