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Flege, S. and Hatada, R. and Kaiser, T. and Muench, F. and Cherkashinin, G. and Schwöbel, A. and Ensinger, W. and Baba, K. (2016):
Use of a nanostructured surface coating to achieve higher sputter rates.
In: Materials Letters, pp. 532-534, 164, ISSN 0167-577X,
[Online-Edition: http://dx.doi.org/10.1016/j.matlet.2015.11.059],
[Article]

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