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Use of a nanostructured surface coating to achieve higher sputter rates

Flege, S. ; Hatada, R. ; Kaiser, T. ; Muench, F. ; Cherkashinin, G. ; Schwöbel, A. ; Ensinger, W. ; Baba, K. (2016):
Use of a nanostructured surface coating to achieve higher sputter rates.
In: Materials Letters, 164, pp. 532-534. ISSN 0167-577X,
[Article]

Abstract

A method is presented which leads to a higher sputter rate as compared to the sputtering of the surface of a bulk sample under the same sputtering conditions: the target is coated beforehand by a separate process to produce a nanostructured film on its surface. In the case of silver, the sputter yield under ion bombardment is 1.7 times higher. If the ions for the bombardment are generated by a voltage applied to the sample, then improvements up to a factor of five can be realized. (C) 2015 Elsevier B.V. All rights reserved.

Item Type: Article
Erschienen: 2016
Creators: Flege, S. ; Hatada, R. ; Kaiser, T. ; Muench, F. ; Cherkashinin, G. ; Schwöbel, A. ; Ensinger, W. ; Baba, K.
Title: Use of a nanostructured surface coating to achieve higher sputter rates
Language: English
Abstract:

A method is presented which leads to a higher sputter rate as compared to the sputtering of the surface of a bulk sample under the same sputtering conditions: the target is coated beforehand by a separate process to produce a nanostructured film on its surface. In the case of silver, the sputter yield under ion bombardment is 1.7 times higher. If the ions for the bombardment are generated by a voltage applied to the sample, then improvements up to a factor of five can be realized. (C) 2015 Elsevier B.V. All rights reserved.

Journal or Publication Title: Materials Letters
Journal volume: 164
Uncontrolled Keywords: Sputtering, Nanostructures, Thin films
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science > Surface Science
Date Deposited: 06 Jun 2016 11:23
Official URL: http://dx.doi.org/10.1016/j.matlet.2015.11.059
Identification Number: doi:10.1016/j.matlet.2015.11.059
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