Flege, S. and Hatada, R. and Kaiser, T. and Muench, F. and Cherkashinin, G. and Schwöbel, A. and Ensinger, W. and Baba, K. (2016):
Use of a nanostructured surface coating to achieve higher sputter rates.
In: Materials Letters, 164, pp. 532-534. ISSN 0167-577X,
[Article]
Abstract
A method is presented which leads to a higher sputter rate as compared to the sputtering of the surface of a bulk sample under the same sputtering conditions: the target is coated beforehand by a separate process to produce a nanostructured film on its surface. In the case of silver, the sputter yield under ion bombardment is 1.7 times higher. If the ions for the bombardment are generated by a voltage applied to the sample, then improvements up to a factor of five can be realized. (C) 2015 Elsevier B.V. All rights reserved.
| Item Type: | Article |
|---|---|
| Erschienen: | 2016 |
| Creators: | Flege, S. and Hatada, R. and Kaiser, T. and Muench, F. and Cherkashinin, G. and Schwöbel, A. and Ensinger, W. and Baba, K. |
| Title: | Use of a nanostructured surface coating to achieve higher sputter rates |
| Language: | English |
| Abstract: | A method is presented which leads to a higher sputter rate as compared to the sputtering of the surface of a bulk sample under the same sputtering conditions: the target is coated beforehand by a separate process to produce a nanostructured film on its surface. In the case of silver, the sputter yield under ion bombardment is 1.7 times higher. If the ions for the bombardment are generated by a voltage applied to the sample, then improvements up to a factor of five can be realized. (C) 2015 Elsevier B.V. All rights reserved. |
| Journal or Publication Title: | Materials Letters |
| Journal volume: | 164 |
| Uncontrolled Keywords: | Sputtering, Nanostructures, Thin films |
| Divisions: | 11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences > Material Science > Material Analytics 11 Department of Materials and Earth Sciences > Material Science > Surface Science |
| Date Deposited: | 06 Jun 2016 11:23 |
| Official URL: | http://dx.doi.org/10.1016/j.matlet.2015.11.059 |
| Identification Number: | doi:10.1016/j.matlet.2015.11.059 |
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