Use of a nanostructured surface coating to achieve higher sputter rates

Flege, S. and Hatada, R. and Kaiser, T. and Muench, F. and Cherkashinin, G. and Schwöbel, A. and Ensinger, W. and Baba, K. :
Use of a nanostructured surface coating to achieve higher sputter rates.
[Online-Edition: http://dx.doi.org/10.1016/j.matlet.2015.11.059]
In: Materials Letters, 164 pp. 532-534. ISSN 0167-577X
[Article] , (2016)

Official URL: http://dx.doi.org/10.1016/j.matlet.2015.11.059

Abstract

A method is presented which leads to a higher sputter rate as compared to the sputtering of the surface of a bulk sample under the same sputtering conditions: the target is coated beforehand by a separate process to produce a nanostructured film on its surface. In the case of silver, the sputter yield under ion bombardment is 1.7 times higher. If the ions for the bombardment are generated by a voltage applied to the sample, then improvements up to a factor of five can be realized. (C) 2015 Elsevier B.V. All rights reserved.

Item Type:	Article
Erschienen:	2016
Creators:	Flege, S. and Hatada, R. and Kaiser, T. and Muench, F. and Cherkashinin, G. and Schwöbel, A. and Ensinger, W. and Baba, K.
Title:	Use of a nanostructured surface coating to achieve higher sputter rates
Language:	English
Abstract:	A method is presented which leads to a higher sputter rate as compared to the sputtering of the surface of a bulk sample under the same sputtering conditions: the target is coated beforehand by a separate process to produce a nanostructured film on its surface. In the case of silver, the sputter yield under ion bombardment is 1.7 times higher. If the ions for the bombardment are generated by a voltage applied to the sample, then improvements up to a factor of five can be realized. (C) 2015 Elsevier B.V. All rights reserved.
Journal or Publication Title:	Materials Letters
Volume:	164
Uncontrolled Keywords:	Sputtering, Nanostructures, Thin films
Divisions:	11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences > Material Science > Material Analytics 11 Department of Materials and Earth Sciences > Material Science > Surface Science
Date Deposited:	06 Jun 2016 11:23
Official URL:	http://dx.doi.org/10.1016/j.matlet.2015.11.059
Identification Number:	doi:10.1016/j.matlet.2015.11.059
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