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2016
Flege, S. ; Hatada, R. ; Kaiser, T. ; Muench, F. ; Cherkashinin, G. ; Schwöbel, A. ; Ensinger, W. ; Baba, K. (2016):
Use of a nanostructured surface coating to achieve higher sputter rates.
In: Materials Letters, 164, pp. 532-534. ISSN 0167-577X,
[Article]