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Durst, F. and Galjukov, A. and Makarov, Y. and Schäfer, Michael and Voinovich, P. and Zhmakin, A. Efficient 3D Unstructured Grid Algorithms for Modelling of Chemical Vapour Deposition in Horizontal Reactors.
In: Simulation of Semiconductor Devices and Processes, 6Springer, pp. 258-261, [Article]

This list was generated on Tue Oct 20 00:43:49 2020 CEST.