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Article

Durst, F. and Galjukov, A. and Makarov, Y. and Schäfer, Michael and Voinovich, P. and Zhmakin, A. Efficient 3D Unstructured Grid Algorithms for Modelling of Chemical Vapour Deposition in Horizontal Reactors.
6, In: Simulation of Semiconductor Devices and Processes, Springer, pp. 258-261, [Article]

This list was generated on Sat Dec 14 01:52:03 2019 CET.