TU Darmstadt / ULB / TUbiblio

Efficient 3D Unstructured Grid Algorithms for Modelling of Chemical Vapour Deposition in Horizontal Reactors

Durst, F. and Galjukov, A. and Makarov, Y. and Schäfer, Michael and Voinovich, P. and Zhmakin, A.
Efficient 3D Unstructured Grid Algorithms for Modelling of Chemical Vapour Deposition in Horizontal Reactors.
In: Simulation of Semiconductor Devices and Processes, Springer, pp. 258-261, 6, [Article]

Item Type: Article
Erschienen: 1996
Editors: Ryssel, H. and Pichler, P.
Creators: Durst, F. and Galjukov, A. and Makarov, Y. and Schäfer, Michael and Voinovich, P. and Zhmakin, A.
Title: Efficient 3D Unstructured Grid Algorithms for Modelling of Chemical Vapour Deposition in Horizontal Reactors
Language: English
Journal or Publication Title: Simulation of Semiconductor Devices and Processes
Volume: 6
Publisher: Springer
Divisions: 16 Department of Mechanical Engineering > Institute of Numerical Methods in Mechanical Engineering (FNB)
16 Department of Mechanical Engineering
Date Deposited: 24 Mar 2014 14:18
Export:
Suche nach Titel in: TUfind oder in Google

Optionen (nur für Redakteure)

View Item View Item