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Efficient 3D Unstructured Grid Algorithms for Modelling of Chemical Vapour Deposition in Horizontal Reactors

Durst, F. ; Galjukov, A. ; Makarov, Y. ; Schäfer, Michael ; Voinovich, P. ; Zhmakin, A.
Efficient 3D Unstructured Grid Algorithms for Modelling of Chemical Vapour Deposition in Horizontal Reactors.
In: Simulation of Semiconductor Devices and Processes, 6, pp. 258-261. Springer, [Article]

Item Type: Article
Erschienen: 1996
Editors: Ryssel, H. ; Pichler, P.
Creators: Durst, F. ; Galjukov, A. ; Makarov, Y. ; Schäfer, Michael ; Voinovich, P. ; Zhmakin, A.
Title: Efficient 3D Unstructured Grid Algorithms for Modelling of Chemical Vapour Deposition in Horizontal Reactors
Language: English
Journal or Publication Title: Simulation of Semiconductor Devices and Processes
Journal volume: 6
Publisher: Springer
Divisions: 16 Department of Mechanical Engineering > Institute of Numerical Methods in Mechanical Engineering (FNB)
16 Department of Mechanical Engineering
Date Deposited: 24 Mar 2014 14:18
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