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English

Durst, F. ; Galjukov, A. ; Makarov, Y. ; Schäfer, Michael ; Voinovich, P. ; Zhmakin, A.
Efficient 3D Unstructured Grid Algorithms for Modelling of Chemical Vapour Deposition in Horizontal Reactors.
In: Simulation of Semiconductor Devices and Processes, 6, pp. 258-261. Springer, [Article]

This list was generated on Sat Nov 27 05:08:48 2021 CET.