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Schmid, Christoph and Maier, V. and Schaufler, J. and Butz, B. and Spiecker, E. and Meier, S. and Göken, M. and Durst, Karsten (2013):
Highly resolved analysis of the chemistry and mechanical properties of an a-C:H coating system by nanoindentation and auger electron spectroscopy.
In: Thin Solid Films, pp. 263-268, (528), ISSN 00406090,
DOI: 10.1016/j.tsf.2012.05.092,
[Article]

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