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Schmid, Christoph ; Maier, V. ; Schaufler, J. ; Butz, B. ; Spiecker, E. ; Meier, S. ; Göken, M. ; Durst, Karsten (2013):
Highly resolved analysis of the chemistry and mechanical properties of an a-C:H coating system by nanoindentation and auger electron spectroscopy.
In: Thin Solid Films, (528), pp. 263-268. ISSN 00406090,
DOI: 10.1016/j.tsf.2012.05.092,
[Article]

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