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Highly resolved analysis of the chemistry and mechanical properties of an a-C:H coating system by nanoindentation and auger electron spectroscopy

Schmid, Christoph and Maier, V. and Schaufler, J. and Butz, B. and Spiecker, E. and Meier, S. and Göken, M. and Durst, Karsten (2013):
Highly resolved analysis of the chemistry and mechanical properties of an a-C:H coating system by nanoindentation and auger electron spectroscopy.
In: Thin Solid Films, pp. 263-268, (528), ISSN 00406090,
DOI: 10.1016/j.tsf.2012.05.092,
[Article]

Item Type: Article
Erschienen: 2013
Creators: Schmid, Christoph and Maier, V. and Schaufler, J. and Butz, B. and Spiecker, E. and Meier, S. and Göken, M. and Durst, Karsten
Title: Highly resolved analysis of the chemistry and mechanical properties of an a-C:H coating system by nanoindentation and auger electron spectroscopy
Language: English
Journal or Publication Title: Thin Solid Films
Number: 528
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Physical Metallurgy
Date Deposited: 19 Jul 2018 11:26
DOI: 10.1016/j.tsf.2012.05.092
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