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Mutamba, Kabula and Pfeiffer, J. and Peerlings, J. and Riemenschneider, R. and Vogt, Alexander and Dehé, A. and Brauch, M. and Meister, B. and Dragojevic, N. (1997):
ANSYS-structural design of micromachined Fabry-Pérot filter with planar membranes.
In: International Topical Meeting on Photoelectronics <1997, Beijing, China>: Proceedings, [Conference or Workshop Item]

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