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ANSYS-structural design of micromachined Fabry-Pérot filter with planar membranes

Mutamba, Kabula ; Pfeiffer, J. ; Peerlings, J. ; Riemenschneider, R. ; Vogt, Alexander ; Dehé, A. ; Brauch, M. ; Meister, B. ; Dragojevic, N. (1997):
ANSYS-structural design of micromachined Fabry-Pérot filter with planar membranes.
In: International Topical Meeting on Photoelectronics <1997, Beijing, China>: Proceedings, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 1997
Creators: Mutamba, Kabula ; Pfeiffer, J. ; Peerlings, J. ; Riemenschneider, R. ; Vogt, Alexander ; Dehé, A. ; Brauch, M. ; Meister, B. ; Dragojevic, N.
Title: ANSYS-structural design of micromachined Fabry-Pérot filter with planar membranes
Language: English
Series Name: International Topical Meeting on Photoelectronics <1997, Beijing, China>: Proceedings
Divisions: 18 Department of Electrical Engineering and Information Technology
Date Deposited: 19 Nov 2008 15:54
License: [undefiniert]
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