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ANSYS-structural design of micromachined Fabry-Pérot filter with planar membranes

Mutamba, Kabula and Pfeiffer, J. and Peerlings, J. and Riemenschneider, R. and Vogt, Alexander and Dehé, A. and Brauch, M. and Meister, B. and Dragojevic, N. (1997):
ANSYS-structural design of micromachined Fabry-Pérot filter with planar membranes.
In: International Topical Meeting on Photoelectronics <1997, Beijing, China>: Proceedings, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 1997
Creators: Mutamba, Kabula and Pfeiffer, J. and Peerlings, J. and Riemenschneider, R. and Vogt, Alexander and Dehé, A. and Brauch, M. and Meister, B. and Dragojevic, N.
Title: ANSYS-structural design of micromachined Fabry-Pérot filter with planar membranes
Language: English
Series Name: International Topical Meeting on Photoelectronics <1997, Beijing, China>: Proceedings
Divisions: 18 Department of Electrical Engineering and Information Technology
Date Deposited: 19 Nov 2008 15:54
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