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English

Mutamba, Kabula ; Pfeiffer, J. ; Peerlings, J. ; Riemenschneider, R. ; Vogt, Alexander ; Dehé, A. ; Brauch, M. ; Meister, B. ; Dragojevic, N. (1997):
ANSYS-structural design of micromachined Fabry-Pérot filter with planar membranes.
In: International Topical Meeting on Photoelectronics <1997, Beijing, China>: Proceedings, [Conference or Workshop Item]

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