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Electrical Performance of Damascene Metal Gate MOSFETs with Crystalline Gd2O3 Gate Dielectric

Endres, Ralf and Stefanov, Yordan and Schwalke, Udo (2006):
Electrical Performance of Damascene Metal Gate MOSFETs with Crystalline Gd2O3 Gate Dielectric.
In: 37th IEEE Semiconductor Interface Specialists Conference (SISC), San Diego, CA, USA, 07.-09.12.2006, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2006
Creators: Endres, Ralf and Stefanov, Yordan and Schwalke, Udo
Title: Electrical Performance of Damascene Metal Gate MOSFETs with Crystalline Gd2O3 Gate Dielectric
Language: English
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Event Title: 37th IEEE Semiconductor Interface Specialists Conference (SISC)
Event Location: San Diego, CA, USA
Event Dates: 07.-09.12.2006
Date Deposited: 27 Jun 2011 14:09
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