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Characterization of Carbon Nanotube Field Effect Transistor (CNTFET) Fabrication Process by Atomic Force Microscopy (AFM) and Conductive-AFM

Wessely, Frank and Ruland, Tino and Schwalke, Udo (2007):
Characterization of Carbon Nanotube Field Effect Transistor (CNTFET) Fabrication Process by Atomic Force Microscopy (AFM) and Conductive-AFM.
European Congress on Advanced Materials and Processes (EUROMAT), Nürnberg, Deutschland, 10.-13.09.2007, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2007
Creators: Wessely, Frank and Ruland, Tino and Schwalke, Udo
Title: Characterization of Carbon Nanotube Field Effect Transistor (CNTFET) Fabrication Process by Atomic Force Microscopy (AFM) and Conductive-AFM
Language: English
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Event Title: European Congress on Advanced Materials and Processes (EUROMAT)
Event Location: Nürnberg, Deutschland
Event Dates: 10.-13.09.2007
Date Deposited: 20 Nov 2008 08:28
License: [undefiniert]
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