TU Darmstadt / ULB / TUbiblio

Browse by Person

Up a level
Export as [feed] Atom [feed] RSS 1.0 [feed] RSS 2.0
Group by: No Grouping | Item Type | Date | Language
Number of items: 1.

Galonska, M. and Gabor, Ch. and Thomae, R. W. and Klein, H. and Volz, K. and Ensinger, W. (2001):
Determination of ion incidence angles in plasma immersion ion implantation by means of a hollow multi-aperture target.
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, pp. 658-662, (175-177), ISSN 0168-583X,
[Online-Edition: http://dx.doi.org/10.1016/S0168-583X(00)00653-4],

This list was generated on Tue Nov 19 00:36:23 2019 CET.