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Galonska, M. and Gabor, Ch. and Thomae, R. W. and Klein, H. and Volz, K. and Ensinger, W. :
Determination of ion incidence angles in plasma immersion ion implantation by means of a hollow multi-aperture target.
[Online-Edition: http://dx.doi.org/10.1016/S0168-583X(00)00653-4]
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (175-177) pp. 658-662. ISSN 0168-583X
[Article] , (2001)

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