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III-V Membrane structures for tunable Fabry-Pérot filters and sensor applications.
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Hartnagel, Hans L. ; Mutamba, K. ; Brandt, M. ; Pfeiffer, J. ; Riemenschneider, R. ; Meißner, P. ; Breuer, B. ; Hennecke, Dietmar K. ; Stoffel, B. (1999):
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III-V Compound semiconductor micromachined actuators for long resonator tunable Fabry-Pérot detectors.
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GaAs/AlAs micromachined tunable Fabry-Pérot filters for dense wavelength division multiplex systems.
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GaAs/AlAs micromachined tunable Fabry-Pérot filters with long resonant cavity.
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Long resonator micromachined tunable GaAs/AlAs Fabry-Pérot filter.
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