Dehé, Alfons ; Peerlings, J. ; Pfeiffer, J. ; Riemenschneider, R. ; Vogt, A. ; Streubel, K. ; Künzel, H. ; Meißner, P. ; Hartnagel, H. L. (1998):
III-V Compound semiconductor micromachined actuators for long resonator tunable Fabry-Pérot detectors.
In: Sensors and Actuators A : Physical, 68 (1-3), pp. 365-371. Elsevier, ISSN 0924-4247,
DOI: 10.1016/S0924-4247(98)00071-5,
[Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 1998 |
| Creators: | Dehé, Alfons ; Peerlings, J. ; Pfeiffer, J. ; Riemenschneider, R. ; Vogt, A. ; Streubel, K. ; Künzel, H. ; Meißner, P. ; Hartnagel, H. L. |
| Title: | III-V Compound semiconductor micromachined actuators for long resonator tunable Fabry-Pérot detectors |
| Language: | English |
| Journal or Publication Title: | Sensors and Actuators A : Physical |
| Journal volume: | 68 |
| Number: | 1-3 |
| Publisher: | Elsevier |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Microwave Electronics |
| Date Deposited: | 19 Nov 2008 16:29 |
| DOI: | 10.1016/S0924-4247(98)00071-5 |
| License: | [undefiniert] |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
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