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III-V Compound semiconductor micromachined actuators for long resonator tunable Fabry-Pérot detectors

Dehé, Alfons and Peerlings, and Pfeiffer, and Riemenschneider, and Vogt, and Streubel, and Künzel, and Meißner, and Hartnagel, (1998):
III-V Compound semiconductor micromachined actuators for long resonator tunable Fabry-Pérot detectors.
In: Sensors and actuators. 68 (1998), S. 365-371, [Article]

Item Type: Article
Erschienen: 1998
Creators: Dehé, Alfons and Peerlings, and Pfeiffer, and Riemenschneider, and Vogt, and Streubel, and Künzel, and Meißner, and Hartnagel,
Title: III-V Compound semiconductor micromachined actuators for long resonator tunable Fabry-Pérot detectors
Language: English
Journal or Publication Title: Sensors and actuators. 68 (1998), S. 365-371
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 16:29
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