| Item Type: |
Article
|
| Erschienen: |
1998 |
| Creators: |
Dehé, Alfons and Peerlings, and Pfeiffer, and Riemenschneider, and Vogt, and Streubel, and Künzel, and Meißner, and Hartnagel, |
| Title: |
III-V Compound semiconductor micromachined actuators for long resonator tunable Fabry-Pérot detectors |
| Language: |
English |
| Journal or Publication Title: |
Sensors and actuators. 68 (1998), S. 365-371 |
| Divisions: |
18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics |
| Date Deposited: |
19 Nov 2008 16:29 |
| License: |
[undefiniert] |
| Export: |
|
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