Item Type: |
Article
|
Erschienen: |
1998 |
Creators: |
Dehé, Alfons and Peerlings, and Pfeiffer, and Riemenschneider, and Vogt, and Streubel, and Künzel, and Meißner, and Hartnagel, |
Title: |
III-V Compound semiconductor micromachined actuators for long resonator tunable Fabry-Pérot detectors |
Language: |
English |
Journal or Publication Title: |
Sensors and actuators. 68 (1998), S. 365-371 |
Divisions: |
18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Microwave Electronics |
Date Deposited: |
19 Nov 2008 16:29 |
License: |
[undefiniert] |
Export: |
|
Suche nach Titel in: |
TUfind oder in Google |