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III-V Compound semiconductor micromachined actuators for long resonator tunable Fabry-Pérot detectors

Dehé, Alfons ; Peerlings, J. ; Pfeiffer, J. ; Riemenschneider, R. ; Vogt, A. ; Streubel, K. ; Künzel, H. ; Meißner, P. ; Hartnagel, H. L. (1998):
III-V Compound semiconductor micromachined actuators for long resonator tunable Fabry-Pérot detectors.
In: Sensors and Actuators A : Physical, 68 (1-3), pp. 365-371. Elsevier, ISSN 0924-4247,
DOI: 10.1016/S0924-4247(98)00071-5,
[Article]

Item Type: Article
Erschienen: 1998
Creators: Dehé, Alfons ; Peerlings, J. ; Pfeiffer, J. ; Riemenschneider, R. ; Vogt, A. ; Streubel, K. ; Künzel, H. ; Meißner, P. ; Hartnagel, H. L.
Title: III-V Compound semiconductor micromachined actuators for long resonator tunable Fabry-Pérot detectors
Language: English
Journal or Publication Title: Sensors and Actuators A : Physical
Journal volume: 68
Number: 1-3
Publisher: Elsevier
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 16:29
DOI: 10.1016/S0924-4247(98)00071-5
License: [undefiniert]
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