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Volz, K. ; Rauschenbach, B. ; Klatt, C. ; Ensinger, W. (2000)
Ammonia plasma immersion ion implantation into silicon: Composition and structure of the resulting silicon–nitrogen–hydrogen system.
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, (166-167)
doi: 10.1016/S0168-583X(99)00866-6
Article, Bibliographie

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