TU Darmstadt / ULB / TUbiblio

Browse by Person

Up a level
Export as [feed] Atom [feed] RSS 1.0 [feed] RSS 2.0
Group by: No Grouping | Item Type | Date | Language
Number of items: 1.

Volz, K. and Rauschenbach, B. and Klatt, C. and Ensinger, W. (2000):
Ammonia plasma immersion ion implantation into silicon: Composition and structure of the resulting silicon–nitrogen–hydrogen system.
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, pp. 75-81, (166-167), ISSN 0168583X,
[Online-Edition: http://dx.doi.org/10.1016/S0168-583X(99)00866-6],
[Article]

This list was generated on Tue Jul 23 01:40:22 2019 CEST.