Artikel

Bergunde, T. ; Dauelsberg, M. ; Egorov, Yu ; Kadinski, L. ; Makarov, Yu N. ; Schäfer, M. ; Strauch, G. ; Weyers, M. (1995)
Algorithms and Models for Simulation of MOCVD of III-V Layers in the Planetary Reactor.
In: Simulation of Semiconductor Devices and Processes, 6
Artikel, Bibliographie

Bergunde, T. ; Durst, F. ; Kadinski, L. ; Makarov, Yu N. ; Schäfer, M. ; Weyers, M. (1994)
Modelling of growth in a 5 X 3 inch multiwafer metalorganic vapour phase epitaxy reactor.
In: Journal of crystal growth, 145 (1)
Artikel, Bibliographie