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Bergunde, T. ; Dauelsberg, M. ; Egorov, Yu ; Kadinski, L. ; Makarov, Yu N. ; Schäfer, M. ; Strauch, G. ; Weyers, M. (1995):
Algorithms and Models for Simulation of MOCVD of III-V Layers in the Planetary Reactor.
In: Simulation of Semiconductor Devices and Processes, 6, pp. 328-331. Springer, [Article]

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