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Modelling of growth in a 5 X 3 inch multiwafer metalorganic vapour phase epitaxy reactor

Bergunde, T. and Durst, F. and Kadinski, L. and Makarov, Yu N. and Schäfer, M. and Weyers, M. (1994):
Modelling of growth in a 5 X 3 inch multiwafer metalorganic vapour phase epitaxy reactor.
In: Journal of crystal growth, Elsevier, pp. 630-635, 145, (1), [Article]

Item Type: Article
Erschienen: 1994
Creators: Bergunde, T. and Durst, F. and Kadinski, L. and Makarov, Yu N. and Schäfer, M. and Weyers, M.
Title: Modelling of growth in a 5 X 3 inch multiwafer metalorganic vapour phase epitaxy reactor
Language: English
Journal or Publication Title: Journal of crystal growth
Volume: 145
Number: 1
Publisher: Elsevier
Divisions: 16 Department of Mechanical Engineering
16 Department of Mechanical Engineering > Institute of Numerical Methods in Mechanical Engineering (FNB)
Date Deposited: 27 Mar 2014 10:52
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