Riemenschneider, Rolf ; Gottwald, P. ; Hartnagel, Hans L.
Hrsg.: Bareikis, V. (1995)
Characterisation of SiO2 deposition by low-temperature plasma and photo CVD using low-frequency noise measurements.
13th International Conference on Noise in Physical Systems and 1/f Fluctuations (ICNF'95). Palanga, Lithuania (29 May-3 June 1995)
Konferenzveröffentlichung, Bibliographie